MICRO AND NANOELECTRONICS RESEARCH LABORATORY

Established: December 29, 2023

Scientific Research Areas of the Laboratory.

- obtaining nano-sized thin films of metal silicides and semiconductor compounds using a magnetron sputtering device;

- analyzing the electronic structure, optical and electrophysical properties and characteristics of thin films;

- conducting scientific research on the creation of semiconductor devices based on new materials and nanostructures: in particular, optical resonators, electronic and magnetic storage devices, radiation detectors, integrated circuits;

Goal of the Laboratory. To develop micro- and nanoelectronics, ensure the integration of science, education and production in these areas, and implement the technology for obtaining new materials used in the field of electronic equipment.

Tasks of the Laboratory.

–  technology for obtaining new nanoscale materials will be developed;

– development of diagnostics of the electronic structure, optical and electrophysical properties of metal silicide thin films formed on the surface of semiconductors;

– creation of technology for obtaining nanoscale structures based on silicide metal and semiconductor compounds used in energy-saving technologies;

– ensuring the participation of university students, master's and doctoral students in regional, republican and international symposiums, seminars and scientific conferences;

– carrying out the necessary preparatory work for the preparation and submission of annual and current reports on the results of the laboratory's scientific research work.

Equipment:

1. EPOS-PVD-DESK-PRO, 2020

2. IRTracer-100, 2021

3. UV 1900, 2022

4. HMS 5000, 2024

5. Supermini 200,

6. Rigaku, 2024

7. UV 2600, 2025

8. SNE ALPA nano SEM, 2025

9. MG-A1200-1L Atmosphere Furnace, 2025